|
Product Showcase
Positioning systems
-
Designed with nonmagnetic piezo motors, Bayside Motion Group's Ultra High Vacuum Linear Positioning Systems operate with low overall system magnetics. All mechanical parts are UHV-rated to eliminate outgassing. Tungsten Disulfide, a dry UHV-compatible lubricant, is applied to all rolling element surfaces to prevent wear without any vacuum grease. The systems' small footprint (350 mm long) provides full travel for 300-mm wafers. They feature crossed roller bearings and noncontact linear encoders to 0.1 micron resolution. Available in multi-axis configurations, the systems provide horizontal and/or vertical motion and are well suited for applications requiring precision motion and vacuum compatibility.
Aerospace Engineering July 2000
|
|
